发明名称 INSPECTION DEVICE, INSPECTION METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To remarkably reduce the manhours for preparing a test program used when a semiconductor memory is tested. SOLUTION: An address/data generator 9, a buffer 10 and a command generator 11 are provided in a memory test device. The address/data generator 9 generates a basic address, a basic data, and cycle information such as a cycle identification information, based on a program main body part PH, so as to be output to the buffer 10. The command generator 11 generates an actual address, an actual data, and various kinds of commands based on the input cycle information, using a cycle definition part CP. The test program comprises the program main body part PH, and the cycle definition part CP, and only rewriting for the cycle definition part CP for defining the information depending on the semiconductor memory is enough to conduct the test easily when the different kind of the semiconductor memory is tested. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003185715(A) 申请公布日期 2003.07.03
申请号 JP20010384222 申请日期 2001.12.18
申请人 HITACHI LTD 发明人 KIKUCHI SHUJI;HIRANO KATSUNORI;SONODA YUJI;SUZUKI ITSUKI;AOKI HIDEYUKI
分类号 G01R31/3183;G01R31/28;G11C29/00;G11C29/10;(IPC1-7):G01R31/318 主分类号 G01R31/3183
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