| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic structural body which has high resistance to a corrosive substance and enables to disperse and supply a fluid for a large area. SOLUTION: The ceramic layered article 6 is formed by a ceramic sintered body 1 and a ceramic film 3 formed on the ceramic sintered body 1 by a chemical vapor deposition method and has a cavity 5 surrounded by the sintered body 1 and the ceramic film 3 and continuous holes 1d, 4 connecting the cavity 5 to the outside. A filler 2 is filled in a concaved space 1c formed in a sintered body 1 and continuous holes 1d, 4 are provided. The resulting body 7 is heat treated to diffuse the filler 2 through the continuous holes 1d, 4, where the concaved space 1c is converted to a cavity 5. COPYRIGHT: (C)2003,JPO |
