发明名称 Gasdurchlass mit selektiv wirkenden Gasdurchtrittsflächen
摘要 The invention relates to a gas transmitter (1) with selective gas permeable surfaces (4), comprising a support disc (3), provided with a number of through openings (2), made from a semiconductor material, a membrane (5), covering the openings (2) in the support disc (3) which forms the selective gas permeable surfaces (4) and means for controlling the temperature of the membrane (5). According to the invention, the temperature control means may be simplified whereby the support disc (3) itself serves as means for controlling the temperature of the membrane (5).
申请公布号 DE10162126(A1) 申请公布日期 2003.07.03
申请号 DE2001162126 申请日期 2001.12.18
申请人 INFICON GMBH 发明人 WETZIG, DANIEL
分类号 G01M3/00;G01M3/20;(IPC1-7):G01M3/26;G01N15/00 主分类号 G01M3/00
代理机构 代理人
主权项
地址