| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for detecting a defect of a sealed package, which can be performed in a short time with sure. SOLUTION: The method comprises a process where a sealed package 1 is housed in a vessel 2, a process where air pressure in the vessel 2 containing the sealed package 1 is lowered than an atmospheric pressure, which condition is kept for a prescribed hours, and a process where the pressure in the vessel 2 is released to the atmospheric pressure after the decompressed period. The device comprises the vessel 2 which houses the sealed package 1, a negative- pressure generating means 6 which sets the pressure in the vessel 2 to be lower than the atmospheric pressure, and a pressure regulating valve 9 and a suction valve 11 which switch the pressure in the vessel 2 between the atmospheric pressure and the decompressed state. COPYRIGHT: (C)2003,JPO
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