发明名称 TUNABLE PIEZOELECTRIC MICRO-MECHANICAL RESONATOR
摘要 <p>One aspect of the invention relates to a composite member for a resonator having an active piezoelectric element and a passive piezoelectric element. The active piezoelectric element causes the resonator to vibrate and detects the frequency of the vibration. The passive piezoelectric element changes the frequency of the vibration. Another aspect of the invention relates to a method for controlling a resonator with composite member having a substrate carrying a composite piezoelectric element. The composite piezoelectric element includes an actuator element, a sensor element and a passive element. The method comprises inducing a resonance within the composite member with the actuator element, detecting the resonance with the sensor element, and altering the resonance by altering the electromechanical coupling of the passive element. Additional aspects and benefits of the invention are also given.</p>
申请公布号 WO2003055063(A1) 申请公布日期 2003.07.03
申请号 US2002039060 申请日期 2002.12.06
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址
您可能感兴趣的专利