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发明名称
Verfahren zur Erzeugung einer feinen Struktur und Gerät mit feiner Struktur
摘要
申请公布号
DE69628372(D1)
申请公布日期
2003.07.03
申请号
DE1996628372
申请日期
1996.03.21
申请人
SHIMADZU CORP., KYOTO
发明人
NAGAMACHI, SHINJI
分类号
H01L21/302;G03F7/004;G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
H01L21/302
代理机构
代理人
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地址
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