| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for laser processing capable of processing at a high speed and in a high quality by keeping high a pulse energy density on a surface of an object to be processed. <P>SOLUTION: A convergent lens 38 converges an incident laser beam, and introduces the incident laser beam to the object 50 to be processed with the converged laser beam. A plurality of scanners 25, 35 scan the incident laser beam. The beam scanned by the scanners is incident to the object 50 through the lens 38. The scanners receive a control from an external unit and conducts scanning operations for moving the incident positions of the beams to the object 50. A sorting unit 10 introduces the beams to the selected partial scanner of the plurality of the scanners, and changes the scanner of the incident destination according to a time. <P>COPYRIGHT: (C)2003,JPO</p> |
