发明名称 COATING APPARATUS, COATING METHOD AND MANUFACTURING METHOD OF COATING SUBSTRATE
摘要 <P>PROBLEM TO BE SOLVED: To improve operation ratio of a die coat type coating apparatus by promptly setting coating conditions (coating parameters). <P>SOLUTION: The coating apparatus comprises a die 18 for a coating fluid material from a slit shape opening to a coat object in a relationship of relative movement, a pump 13 that begins and stops suppling the fluid material at a specific time, a dispense roll 21 that conducts preliminary coating by the die 18 prior to coating the fluid material on the coating object, a pressure 17 that measures the pressure of the fluid material fed from the pump 13 to the die 18 during preliminary coating to the dispense roll 21, and a control device 30. This control device 30 obtains a transfer function between operation and discharge rate of the pump 13 on the basis of pressure measured by the pressure sensor 17 and controls operation of the pump 13 during coating to the coating object on the basis of the transfer function thus obtained. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003181360(A) 申请公布日期 2003.07.02
申请号 JP20010380864 申请日期 2001.12.14
申请人 MITSUBISHI CHEMICALS CORP 发明人 YAMAUCHI YASUTSUGU
分类号 G03F7/16;B05C5/02;B05C9/00;B05C11/10;B05D1/26;B05D3/00;B05D7/24 主分类号 G03F7/16
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