| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum press apparatus capable of bonding a film-like material on even a substrate having a deep recessed part on its surface without leaving bubbles in the recessed part. SOLUTION: The vacuum press apparatus 1 is provided with a vacuum chamber 1. The chamber 1 is provided with an upper housing member 2 and a lower housing member 3. An upper pressurizing block 17 and a lower pressurizing block 18 are provided in the chamber 1. The blocks 17, 18 have heater plates 20, 23 respectively. A mechanical driving device 29 is provided to allow one of the blocks 17, 18 to approach and separate from the other. The device 29 has a plurality of rods 25 extending so as to pierce upper and lower housing members 2, 3. By the operation of the device 29, the substrate 14 holding the film-like material on its surface can be sandwiched between the blocks 17 and 18. COPYRIGHT: (C)2003,JPO |
