发明名称 |
Method and device for inspecting a microactuator |
摘要 |
A current value of each second harmonic content is measured while changing a frequency of an AC drive voltage applied to comb capacitors within a specified range. A frequency-current value characteristic is obtained for the second harmonic content, and the obtained characteristic is substituted with the vibration frequency-velocity characteristic of a microactuator.
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申请公布号 |
US6586947(B2) |
申请公布日期 |
2003.07.01 |
申请号 |
US20010005401 |
申请日期 |
2001.12.05 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
TAKAHASHI YOSHIKZU |
分类号 |
B81C99/00;G01R31/28;G11B21/10;H02N1/00;H02N2/00;(IPC1-7):G01R27/26 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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