发明名称 PATTERNING OF SOLID STATE FEATURES BY DIRECT WRITE NANOLITHOGRAPHIC PRINTING
摘要 The present invention includes a method of fabricating organic/inorganic composite nanostructures on a substrate comprising depositing a solution having a block copolymer and an inorganic precursor on the substrate using dip pen nanolithography. The process can comprise providing a substrate, providing a nanoscopic tip having an inking composition thereon, wherein the inking composition comprises at least one metal oxide precursor; and transferring the inking composition from the nanoscopic tip to the substrate to form a deposit on the substrate comprising at least one metal oxide precursor, and optionally further comprising the step of converting the metal oxide precursor on the substrate to form the metal oxide. The nanostructures comprises arrays of lines and/or dots having widths/diameters less than 1 micron. The present invention also includes a device comprising an organic/inorganic composite nanoscale region chemically bonded to a substrate, wherein the nanoscale region, wherein the nanoscale region has a nanometer scale dimension other than height.
申请公布号 AU2002364001(A1) 申请公布日期 2003.06.30
申请号 AU20020364001 申请日期 2002.12.17
申请人 NORTHWESTERN UNIVERSITY 发明人 CHAD, A. MIRKIN;VINAYAK, P. DRAVID;MING SU;XIAOGANG LIU
分类号 B82B3/00;G03F7/00;H01L21/027 主分类号 B82B3/00
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