| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide device and a method for manufacturing the device in which an optical waveguide layer comprising a perovskite oxide such as PLZT, PZT or the like can be formed on a MgO substrate without causing damages thereto. <P>SOLUTION: The optical waveguide device comprises a MgO substrate 10 and a slab waveguide layer 24 formed on the MgO substrate 10 and having a core layer 18 made of a ferroelectric material or an antiferroelectric material. The device further has a stress relaxing layer 12 formed between the MgO substrate 10 and the slab waveguide layer 24, mostly matching in lattices with the MgO substrate 10 and the slab waveguide layer 24 and having the average coefficient of thermal expansion in the range from 8.0×10<SP>-6</SP>to 13.0×10<SP>-6</SP>/°C from room temperature to 700°C. <P>COPYRIGHT: (C)2003,JPO</p> |
