| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an inexpensive protective film excellent in heat resistance and water resistance. <P>SOLUTION: The protective film is deposited on an optical multilayer film applied on a reflector. The protective film contains SiO<SB>2</SB>and Al<SB>2</SB>O<SB>3</SB>as the essential components by ≥95 mass% in total and is deposited by using mullite as the vapor deposition source. <P>COPYRIGHT: (C)2003,JPO |
