发明名称 INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To prevent break or disconnection of wirings on the cell boundary lines with the existing process. SOLUTION: In this integrated circuit, a plurality of cells 801 are allocated in the regular pattern, each cell is connected to the adjacent cells with a wiring layer 802, and the wiring layer is extended toward the external side of the pattern of a plurality of cells. Moreover, in this integrated circuit, thickness of the wiring layer is formed thick (wide area 803) or the wiring layer is led out obliquely so that a layout of the wiring layer is different from that of the other portions at the boundary part between the cell pattern and external side (boundary line 804). Moreover, the wiring layer at the boundary part is connected to the wiring layer existing at the lower part of a high reflection coefficient thin film existing within the cells. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003179060(A) 申请公布日期 2003.06.27
申请号 JP20020243660 申请日期 2002.08.23
申请人 CANON INC 发明人 WATANABE HIDENORI;KUWABARA EIJI;YUGE YUTAKA;HOSHI JUNICHI;OKITA AKIRA
分类号 H01L21/3205;H01L21/82;H01L21/822;H01L23/52;H01L27/04;(IPC1-7):H01L21/320 主分类号 H01L21/3205
代理机构 代理人
主权项
地址