发明名称 ORGANIC SEMICONDUCTOR ELEMENT AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide an organic semiconductor element whose insulation film arranged between an organic semiconductor unit and a gate electrode is formed through plasma treatment under atmospheric pressure, and to provide the manufacturing method thereof. SOLUTION: The organic semiconductor element is provided with a source electrode S, a drain electrode D, the organic semiconductor unit connecting the source electrode S and the drain electrode D, the gate electrode G, and the insulation film arranged between the organic semiconductor unit and the gate electrode G. The insulation film is formed through the plasma treatment under atmospheric pressure. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003179234(A) 申请公布日期 2003.06.27
申请号 JP20020259164 申请日期 2002.09.04
申请人 KONICA CORP 发明人 HIRAI KATSURA;FUNAYAMA SATOSHI;EGUCHI TOSHIYA;YAMAMOTO NAOTO
分类号 H01L21/473;H01L21/336;H01L29/786;H01L51/00;H01L51/05;H01L51/40;(IPC1-7):H01L29/786 主分类号 H01L21/473
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