发明名称 LITHOGRAPHY SYSTEM AND DOUBLE BELLOWS SEAL
摘要 PROBLEM TO BE SOLVED: To provide a bellows seal which connects separate containers and reduces vibration quantity transferred through the seal. SOLUTION: This double bellows seal is constituted by a plurality of rings containing a first and a second end ring 312, 314 and an intermediate ring 316, and a first and a second bellows 308, 310. The first bellows 308 is formed of a flexible material which is connected air-tight between the first end ring 312 and the intermediate ring 316, and has a torque with respect to the axis of these rings in a first rotary direction. The second bellows 310 is formed of a flexible material which is connected air-tight between the second end ring 314 and the intermediate ring 316, and has a torque with respect to the axis of these rings in a second rotary direction which is opposite to the first rotary direction. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003178962(A) 申请公布日期 2003.06.27
申请号 JP20020237136 申请日期 2002.08.15
申请人 SKY PIA:KK;NIKON CORP 发明人 SUGIMOTO HIROSHI;PHILLIPS ALTON HUGH
分类号 F16J3/04;G03B17/04;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 F16J3/04
代理机构 代理人
主权项
地址