发明名称 VACUUM ELECTRIC ARC DEVICE
摘要 FIELD: vacuum-plasma technology; applicable in working of long and large-sized articles. SUBSTANCE: device has extended cylindrical cathode with symmetrical electrostatic screens located on it, and is provided with current lead-ins from ends and connected to electric circuit for switching-on the limiting resistors and to power source; igniter electrode and anode. In this case, electrostatic screens are installed at current lead-ins by cathode cut followed by magnetic systems forming axial-symmetrical counter magnetic field. Electric circuit has switching device for connection of separate power sources to control resistor. EFFECT: higher serviceability of plasma source, efficiency in use of cathode material, uniformity in coating formation. 1 dwg
申请公布号 RU2207399(C2) 申请公布日期 2003.06.27
申请号 RU20010122532 申请日期 2001.08.07
申请人 INSTITUT PROBLEM MASHINOVEDENIJA RAN 发明人 BUROV I.V.;KUZNETSOV V.G.;LISENKOV A.A.;RYBNIKOV S.I.
分类号 C23C14/35;H05H1/50;(IPC1-7):C23C14/35 主分类号 C23C14/35
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