发明名称 |
VACUUM ELECTRIC ARC DEVICE |
摘要 |
FIELD: vacuum-plasma technology; applicable in working of long and large-sized articles. SUBSTANCE: device has extended cylindrical cathode with symmetrical electrostatic screens located on it, and is provided with current lead-ins from ends and connected to electric circuit for switching-on the limiting resistors and to power source; igniter electrode and anode. In this case, electrostatic screens are installed at current lead-ins by cathode cut followed by magnetic systems forming axial-symmetrical counter magnetic field. Electric circuit has switching device for connection of separate power sources to control resistor. EFFECT: higher serviceability of plasma source, efficiency in use of cathode material, uniformity in coating formation. 1 dwg
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申请公布号 |
RU2207399(C2) |
申请公布日期 |
2003.06.27 |
申请号 |
RU20010122532 |
申请日期 |
2001.08.07 |
申请人 |
INSTITUT PROBLEM MASHINOVEDENIJA RAN |
发明人 |
BUROV I.V.;KUZNETSOV V.G.;LISENKOV A.A.;RYBNIKOV S.I. |
分类号 |
C23C14/35;H05H1/50;(IPC1-7):C23C14/35 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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地址 |
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