ELECTRICALLY TUNABLE INTERFEROMETRIC FILTER

摘要

The invention relates to a hybrid interferometric filter device (10) manufactured as a layered structure on a substrate and comprising multiple, individually electrically tunable optical resonator cavities (11, 12) arranged on top of each other on a common optical axis. According to the invention said device (10) comprises at least a first type optical resonator cavity (11) having electrostatic means for tuning the optical length of said cavity (11) by changing the distance between the end mirror elements (15, 16) of said cavity (11), and a second type optical resonator cavity (12) having thermal means (13, 14) for tuning the optical length of said cavity (12) by changing the temperature, and accordingly the refractive index of the cavity medium of said cavity (12). The device according to the invention may be used for example as an electrically tunable component in WDM systems, such as a WADM device.