FLOW SENSOR

摘要

A flow sensor is constructed to satisfy the relation f = k1/d - k2 where k1 = 19,000, 0 ≤ k2 ≤ 200, f (Hz) is the switching frequency at which heating resistors are alternately heated, d (µm) is the distance between the heating resistor and a temperature sensor, and k1 and k2 are constants. The distance between the heating resistor and the temperature sensor is 1µm or more and 30µm or less. As a result, the output frequency can be set the sampling frequency or higher of an engine control unit for an automobile, and the flow sensor can be applied to automobile.