THERMOREFLECTANCE MICROSCOPE FOR MEASURING AN INTEGRATED CIRCUIT TEMPERATURE

摘要

The invention concerns a thermoreflectance microscope for measuring the temperature of an integrated circuit (1). Said circuit is coated with a passivation layer (2). The light source (3) emits in a wavelength domain ( lambda 1, lambda 2), a focusing optical system (10) provides optical phase conjugations of the source and of the detector (6) with the measured circuit. The invention is characterized in that the passivation layer (2) is sufficiently opaque in the spectral domain ( lambda 1, lambda 2). Its measured temperature represents that of the components it covers. The spectral domain ( lambda 1, lambda 2) is advantageously in the ultraviolet.