THERMAL TREATMENT APPARATUS

摘要

In a thermal treatment apparatus comprising a plurality of thermal treatment chambers in which an object to be treated is thermally treated while being transported, at least one pair of two adjacent thermal treatment chambers of which inside temperatures are different from each other are connected through a thermal insulating structural member, whereby thermal conduction between the chambers such as muffles is prevented to reduce a heat loss caused in the thermal treatment apparatus, and therefore, input thermal energy which is necessary to carry out a predetermined thermal treatment is significantly reduced without affecting quality and yield of the object.