| 摘要 |
PURPOSE: Provided is an exposure apparatus capable of preventing halation, which can prevent the halation by not irradiating scattering-light, generated from vacuum holes, to a non-exposure area of a negative organic insulating layer when exposing the negative organic insulating layer. CONSTITUTION: The exposure apparatus contains: a mask(300) having a pattern for limiting the exposure area of an insulating substrate(100) of a liquid crystal display, wherein the insulating substrate(100) is coated with a negative organic material as a photoresist; a substrate stage(200) which supports the insulating substrate(100) and has a plurality of the vacuum holes(210) for vacuum-adsorbing the insulating substrate(100), wherein the corners of the vacuum holes(210) are rounded. |
