SEMICONDUCTOR CLEANING SYSTEM AND DRIVING METHOD THEREOF

摘要

PURPOSE: A semiconductor cleaning system is provided to prevent a wafer from being damaged by malfunction of the cleaning system by detecting whether chemical or process gas is supplied to a chemical cleaning unit and by interlocking the cleaning system while informing an operator of an abnormal supply of the chemical when the chemical is not normally supplied to the chemical cleaning unit. CONSTITUTION: A detection unit detects a chemical supply state of the chemical cleaning unit. A control unit(150) determines whether the cleaning system is interlocked according to the data of the detection unit. An alarm unit(160) alarms when the chemical is not supplied to the chemical cleaning unit according to a control signal of the control unit.