| 摘要 |
PURPOSE: An inductor is provided to be capable of improving an inductor efficiency by forming a coil part on a semiconductor substrate and forming a core part of a soft magnetic substance so as to cover the coil part. CONSTITUTION: A coil part(20) is formed on a semiconductor substrate(10) on which a predetermined structure is formed, and a nitride film(22) is formed to the coil part in order to protect the coil part. A core part(32) is formed on the nitride film and stores a magnetic field induced by the coil part. The core part is formed using a permalloy where nickel and ferrous are contained with a ratio of 80 to 20 or is formed by a sputtering method using an amorphous soft magnetic substance or a micro-fine crystal soft magnetic substance.
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