发明名称 |
DEVICE AND METHOD FOR PLASMA PROCESSING AND WAVE RETARDATION PLATE |
摘要 |
In a microwave plasma processing apparatus that uses a radial line slot antenna, a slot plate (16) is formed by a material having a thermal expansion rate close to the wave retardation plate (18), or depositing a metal on a dielectric plate constituting the wave retardation plate (18). An intimate contact between the wave retardation plate and a slot plate constituting a microwave radiation surface is improved so as to prevent an abnormal electric discharge. <IMAGE>
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申请公布号 |
IL153157(D0) |
申请公布日期 |
2003.06.24 |
申请号 |
IL20020153157 |
申请日期 |
2002.03.28 |
申请人 |
TADAHIRO OHMI;TOKYO ELECTRON LIMITED |
发明人 |
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分类号 |
H05H1/46;B01J19/08;C23C16/511;H01J37/32;H01L21/302;H01L21/31;(IPC1-7):H01L |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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