| 摘要 |
PROBLEM TO BE SOLVED: To form various shapes of micro grooves and filters in a fabricating method for an active micro-fluidic device. SOLUTION: A mechanically stable support layer is formed over a layer of a etchable material, in a method of fabricating a microstructure for micro- fluidics applications. An anisotropic etching is carried out via a mask to form a pattern of holes extending through the support layer into the etchable material. An isotropic etch is conducted through the each hole to form a corresponding cavity in the etchable material under the each hole and expanding under the support layer. An additional layer of depositable material is formed over the support layer until portion of the depositable layer overhunging the each hole meet and thereby close the cavity formed under the each hole. COPYRIGHT: (C)2003,JPO
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