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发明名称
APPARATUS AND METHOD FOR SINGLE- OR DOUBLE- SUBSTRATE PROCESSING
摘要
申请公布号
AU2002362092(A1)
申请公布日期
2003.06.23
申请号
AU20020362092
申请日期
2002.12.06
申请人
SCP GLOBAL TECHNOLOGIES, INC.
发明人
ERIC HANSEN;VICTOR MIMKEN;MARTIN BLECK;RAO, M. YALAMANCHILI;JOHN ROSATO
分类号
B08B3/04;B08B3/08;B08B3/12;H01L21/00;H01L21/02;H01L21/304;H01L21/306;(IPC1-7):H01L21/306;B08B3/00
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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