| 摘要 |
<p>FIELD: method of cutting friable non-metallic materials; laser cutting of glass, monocrystals, ceramics and semiconductor materials. SUBSTANCE: proposed method includes heating of material over line of cut by means of laser beam followed by cooling by means of cooling agent at relative motion of laser beam and material; for manufacture of small parts, heating is performed by means of two laser beams located on surface of material at definite distance in direction perpendicular to direction of motion of laser beam and material. Besides that, cutting is performed in first cycle at pitch dictated by distance between beams and subsequent cycles are performed at halved pitch. Laser beams are extended over surface of material. Surface of material is subjected to additional action in zone of notch by at least one source of elastic waves. Elastic waves are concentrated in zone of notch over line of cut; amplitude and frequency of elastic waves depend on depth of notch or open cutting. Action of elastic waves may be made after making the notch. EFFECT: increased productivity; improved quality of cutting. 9 cl, 7 dwg, 2 ex</p> |
