| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical switch in which the power consumption of an actuator can be minimized. SOLUTION: An MEMS optical switch includes a reciprocating mass which is positioned in the center, a 1st rotary shaft which is positioned symmetrically on the right and left sides of the reciprocating mass, a 1st rotary spring which supports the 1st rotary mass, a linear spring which is coupled with the 1st rotary mass and supports the 1st rotary mass together with the 1st rotary spring, a 2nd rotary mass which is coupled with the linear spring to restrict its displacement in one direction, a 2nd rotary spring which couples and supports the 2nd rotary mass at both right and left ends, a 2nd rotary shaft with which the 2nd rotary mass is rotationally coupled, structural anchors at both right and left ends including the 2nd rotary shaft, a driving electrode, and a micromirror which moves by the same displacement as the reciprocating mass and has an electrostatic actuator which has structural stability position at two places for the reciprocating mass and right and left side rotational masses and a substrate. COPYRIGHT: (C)2003,JPO
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