EVALUATION METHOD FOR OPTICAL DISTORTION AND EVALUATION DEVICE

摘要

PROBLEM TO BE SOLVED: To solve the problems of insufficient measurement sensitivity and lack of versatility which conventional PM method has.

SOLUTION: The invention compares the image of a reference pattern 101b obtained by transmitting through a transparent body (glass plate 102) to a prescribed template image and evaluates the optical distortion of the transparent body (glass plate 102) by deriving the correlation value based on the comparison result. The template image is an image deformed by the enlargement or reduction of the reference pattern 101b.

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