| 摘要 |
PROBLEM TO BE SOLVED: To carry out with high precision measurement of the interval between the electrodes, which is necessary for the assembly of an electron gun having Gm electrode of small pore size between the G2-G3 electrodes. SOLUTION: The electron gun assembly inspection device comprises a mandrel 5 that has a diameter larger than the diameter of an electron beam passing hole of Gm electrode 30 and, by being inserted from the G3 electrode 40 side, contacts the electron beam passing hole surroundings the Gm electrode 30 and closes the electron beam passing hole, and a measuring nozzle of which the top end is capable of entering and moving in the electron beam passing hole of G1 electrode 10 and G2 electrode 20 and, by being inserted from the G1 electron 10 side, blows the air from inside toward the mandrel 5 and measures the interval of G2-Gm electrodes based on the changes of that air pressure. COPYRIGHT: (C)2003,JPO
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