| 摘要 |
A method for scheduling production flow includes processing a plurality of manufactured items in a process flow. Item health metrics are determined for at least a subset of the plurality of manufactured items, Tool health metrics are determined for a plurality of tools (30-80) in the process flow. The manufactured items are scheduled for processing in the tools (30-80) based on the item health metrics and the tool health metrics, A manufacturing system (10) includes a plurality of tools (30-80) for processing a plurality of manufactured items in a process flow, an item health monitor (130), a tool health monitor (150), and a scheduling server (90). The item health monitor (130) is configured to determine item health metrics for at least a subset of the plurality of manufactured items, The tool health monitor (150) is configured to determine tool health metrics for at least a subset of the plurality of tools (30-80), The scheduling server (90) is configured to schedule the manufactured items for processing in the tools (30-80) based on the item health metrics and the tool health metrics. |
