| 摘要 |
PURPOSE: A chemical supply apparatus of a semiconductor manufacturing equipment is provided to be capable of easily checking the replacing time of reserved chemicals by using the first and second alarming part. CONSTITUTION: A chemical supply apparatus of a semiconductor manufacturing equipment is provided with a plurality of process chambers(11,12,13), the first chemical container(31) for processing, the second chemical container(33) for reserving, a weight sensor(35) for sensing the remaining chemicals of the second chemical container by using the weight of the remaining chemicals, a weight sensor controller(40) for operating the first alarming part(41) by receiving an exhaustion state signal of the reserved chemicals from the weight sensor, a plurality of valves(V1,V2) connected with the second chemical container for controlling the chemicals flowed in and out, and a refilling controller(50) for operating the second alarming part(51) when receiving the exhaustion state signal.
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