发明名称 |
Multi-layer burner module, adapter, and assembly therefor |
摘要 |
A burner module for delivering a flow of chemical reactants to a combustion site of a chemical vapor deposition process includes a plurality of substantially planar layers. The substantially planar layers are arranged in a generally parallel and fixed relationship and define an inlet, an outlet and a passage fluidly connecting the inlet and outlet. At least one of the layers is a distribution layer having a plurality of apertures therethrough and fluidly communicating with the passage. The plurality of apertures collectively define a non-uniform pattern arranged and configured to improve the uniformity of a flow out through the outlet. Burner adapter and assembly embodiments are also included. |
申请公布号 |
US2003113679(A1) |
申请公布日期 |
2003.06.19 |
申请号 |
US20010027846 |
申请日期 |
2001.12.19 |
申请人 |
BAKSHI SHIVALIK;HAWTOF DANIEL W.;ROSETTIE JOHN S.;ROVELSTAD AMY L.;STONE JOHN |
发明人 |
BAKSHI SHIVALIK;HAWTOF DANIEL W.;ROSETTIE JOHN S.;ROVELSTAD AMY L.;STONE JOHN |
分类号 |
F23D23/00;F23D99/00;(IPC1-7):F23D14/12;F23D11/36;F23D11/00;F23D3/40 |
主分类号 |
F23D23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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