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发明名称
CONTROL OF SEPARATION BETWEEN GATE AND STORAGE NODE IN VERTICAL DRAM
摘要
申请公布号
EP1319248(A2)
申请公布日期
2003.06.18
申请号
EP20010966082
申请日期
2001.08.22
申请人
INFINEON TECHNOLOGIES NORTH AMERICA CORP.
发明人
SEITZ, MIHEL;KNORR, ANDREAS;MCSTAY, IRENE
分类号
H01L21/8242;(IPC1-7):H01L21/824;H01L21/20
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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