METHOD FOR DEFINING A SOURCE AND A DRAIN AND A GAP INBETWEEN,申请号AU20020348870-传众专利搜索

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发明名称	METHOD FOR DEFINING A SOURCE AND A DRAIN AND A GAP INBETWEEN
摘要
申请公布号	AU2002348870(A1)	申请公布日期	2003.06.17
申请号	AU20020348870	申请日期	2002.11.25
申请人	KONINKLIJKE PHILIPS ELECTRONICS N.V.	发明人	MARTIN, H. BLEES;MARCEL, R. BOEHMER
分类号	H01L21/28;C23C18/16;H01L21/285;H01L21/288;H01L21/336;H01L29/417;H01L29/45;H01L29/786;H01L51/05;(IPC1-7):H01L21/385	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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