| 发明名称 |
Arc evaporator, method for driving arc evaporator, and ion plating apparatus |
| 摘要 |
An arc evaporator comprises: an anode; an evaporation source electrode as a cathode; and a current control unit for supplying an AC square wave arcing current across the anode and the evaporation source electrode.
|
| 申请公布号 |
US6579428(B2) |
申请公布日期 |
2003.06.17 |
| 申请号 |
US20010963763 |
申请日期 |
2001.09.26 |
| 申请人 |
SHINMAYWA INDUSTRIES, LTD.;CITIZEN WATCH CO., LTD. |
发明人 |
TAKIGAWA SHIROU;NOSE KOUICHI;KOIZUMI YASUHIRO;HORI TAKANOBU;MIYA YUKIO |
| 分类号 |
H05H1/36;C23C14/24;C23C14/32;C23C16/50;C23C16/503;C23C16/515;C23C16/517;(IPC1-7):C23C14/00;C23C16/00 |
主分类号 |
H05H1/36 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
