发明名称 |
Damascene fabrication of nonplanar microcoils |
摘要 |
A process for fabricating coils using a Damascene process uses a curved substrate having a surface extending along and about an axis made of a first material. A groove is formed in the curved surface along and around said axis, and the groove is filled with a second material that is different from the first material to form a coil of second material in said first material. Excess second material is then removed from the surface of the first material, leaving the coil of second material in the groove.
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申请公布号 |
US6578254(B2) |
申请公布日期 |
2003.06.17 |
申请号 |
US20000733396 |
申请日期 |
2000.12.08 |
申请人 |
SANDIA CORPORATION |
发明人 |
ADAMS DAVID P.;VASILE MICHAEL J. |
分类号 |
H01F17/00;H01F41/04;(IPC1-7):H01F7/06 |
主分类号 |
H01F17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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