| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a conveyance method for fragile materials which can convey plural small pieces cut from a fragile material base plate en bloc in a well-ordered state from upon a retaining table without injuring the small pieces and prevents the small pieces after the conveyance from being contaminated and a cutting/conveyance device. <P>SOLUTION: In the conveyance method for fragile materials and a cutting/ conveyance device, a plate glass 15 is fixed on the retaining table 18, the plural small pieces 24 which are cut are fixed in the well-ordered state via first frozen layers E1 of an aqueous solution Y by a first refrigeration chuck 17 which is provided with a first refrigeration pipe 19 and a first heating heater wiring 20, water W is supplied to the upper surfaces of the small pieces 24, the small pieces 24 are fixed on a second refrigeration chuck 25 via second frozen layers E2 by the second refrigeration chuck 25 which is provided with a second refrigeration pipe 27 and a second heating heater wiring 26 and, subsequently, the first frozen layers E1 are defrosted, the small pieces 24 in the well-ordered state are released and are transferred to the second refrigeration chuck 25 and are conveyed by a conveying means 23. <P>COPYRIGHT: (C)2003,JPO</p> |
