| 摘要 |
PROBLEM TO BE SOLVED: To make a tape carrier, particularly, a thinned tape carrier to be transported more surely. SOLUTION: In a method of manufacturing semiconductor device, a semiconductor manufacturing device having a chute which becomes the transporting route of a flexible film and a feeding mechanism which drives the film by means of drive rollers press-contacting the film is used. Idling sprockets respectively having teeth which are fitted in holes formed in both edge sections of the film are attached to the chute and, at the time of moving the film, the lateral displacement of the film is prevented by the sprockets. When this constitution is used, the tape carrier can be transported more surely, because both edge sections of the carrier are not deviated from the drive rollers and the carrier does not come off the driving rollers during transportation. Since no driving force is applied to the idling sprockets, the tape carrier is not damaged. COPYRIGHT: (C)2003,JPO
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