| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for feeding a liquid source material capable of easily feeding a CVD liquid source material to a vaporizing/ feeding apparatus without discontinuing feeding of the vaporized CVD liquid source material to a CVD apparatus in feeding the vaporized CVD liquid source material. SOLUTION: This apparatus for feeding a liquid source material is a portable liquid-source-material feeding apparatus, which comprises a CVD liquid-source- material container and a cleaning-liquid container. The CVD liquid-source- material container is provided with a heating means, a CVD liquid-source- material feeding tube for feeding the CVD liquid source material to the outside, and an inlet tube for compressed gas for transportation. The cleaning-liquid container is provided with a cleaning-liquid feeding tube for feeding the cleaning liquid to the CVD liquid-source-material feeding tube and an inlet tube for compressed gas for transportation. Besides, to the CVD liquid-source-material feeding tube, a discharge tube for discharging residual cleaning liquid to the outside is connected. The CVD liquid source material is fed to the vaporizing/ feeding apparatus by using the portable liquid-source-material feeding apparatus. COPYRIGHT: (C)2003,JPO
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