| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stage apparatus having a driving device for moving a first table on which a moved body is mounted in Z-direction (vertical direction), capable of performing high-speed and high-accuracy positioning processing. <P>SOLUTION: This stage apparatus includes a work table 33 for mounting a wafer W, a voice coil motor 45 for moving the work table 33 in the Z- direction, an X-table 40 loaded with the voice coil motor 45, an X-Y direction driving device 35 for moving the X-table in the X-Y directions, a shock absorber 50A disposed between the work table 33 and the X-table 40, and a shock absorber 50B disposed between the voice coil motor 45 and the X-table 40. The force generated by the voice coil motor 45 is inhibited from being applied to the X-table 40 by the shock absorbing operation of the shock absorbers 50A, 50B. <P>COPYRIGHT: (C)2003,JPO</p> |
