发明名称 METHOD FOR PREVENTING DETERIORATION OF POLARIZATION OF FERROELECTRIC CAPACITOR
摘要 PURPOSE: A method for preventing the deterioration of polarization of a ferroelectric capacitor is provided to be capable of improving the fatigue phenomenon due to the polarization deterioration and prolonging the lifetime of the ferroelectric capacitor using an imprint phenomenon. CONSTITUTION: A ferroelectric capacitor is manufactured. The ferroelectric capacitor has a polarization state and a zero polarization state at a time. Partial switching signals are continuously applied by using the two polarization states as memory logic. Preferably, the ferroelectric capacitor has an asymmetrical multilayer structure. At this time, the asymmetrical multilayer structure includes an upper and lower electrode, and an insertion layer between one out of the electrodes and a ferroelectric part. Preferably, the insertion layer is made of one selected from a group consisting of conductive ceramic, metal, and polymer.
申请公布号 KR100389124(B1) 申请公布日期 2003.06.13
申请号 KR19950033918 申请日期 1995.10.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YOO, IN GYEONG
分类号 H01L27/105;(IPC1-7):H01L27/105 主分类号 H01L27/105
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