发明名称 METHOD OF MONITORING PGO SPIN-COATING PRECURSOR SOLUTION SYNTHESIS USING UV SPECTROSCOPY
摘要 A method of monitoring the synthesis of a PGO spin-coating precursor solution includes monitoring heating of the solution with a UV spectrometer and terminating the heating step when a solution property reaches a predetermined value. The method utilizes the starting materials of lead acetate trihydrate (Pb(OAc)2.3H2O) and germanium alkoxide (Ge(OR)4(R=C2H5 and CH(CH3)2)). The organic solvent is di(ethylene glycol) ethyl ether. The mixed solution of lead and di(ethylene glycol) ethyl ether is heated in an atmosphere of air at a temperature no greater than 190° C., and preferably no greater than 185° C. for a time period in a range of approximately eighty-five minutes. During the heating step the solution properties are monitored to determine when the reaction is complete and when decomposition of the desired product begins to take place. The solution is then added to germanium di(ethylene glycol) ethyl ether to make the PGO spin-coating solution. This second step also entails heating the solution to a temperature no greater than 190° C. for a time period in a range of 0.5 to 2.0 hours. This heating step is also monitored with a UV spectrometer to determine when the heating step should be terminated. The process results in a PGO precursor solution suitable for use in spin-coating.
申请公布号 US2003108670(A1) 申请公布日期 2003.06.12
申请号 US20030345636 申请日期 2003.01.15
申请人 SHARP LABORATORIES OF AMERICA, INC. 发明人 ZHUANG WEI-WEI;ZHANG FENGYAN;MAA JER-SHEN;HSU SHENG TENG
分类号 H01L21/027;C01G21/00;H01L21/314;H01L21/316;H01L21/8246;H01L21/8247;H01L27/105;H01L29/788;H01L29/792;(IPC1-7):B05D3/12;B05D3/02 主分类号 H01L21/027
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