发明名称 Optical beam sampling monitor
摘要 A photo-detector device is arranged for in-beam monitoring of a light beam. The device absorbs a proportion of the energy of the beam whilst allowing the remainder of the energy of the beam to pass through. In this way, a sampling mirror and photo-detector arrangement can be replaced with a photo-detector which provides within its own structure the sampling function. There are a number of applications where in-line sampling is required, and the invention can be used in many such applications.
申请公布号 US2003106988(A1) 申请公布日期 2003.06.12
申请号 US20010006509 申请日期 2001.12.06
申请人 SEVERN JOHN 发明人 SEVERN JOHN
分类号 G01J1/42;H01L31/09;H01L31/101;H01L31/103;(IPC1-7):H01L31/00 主分类号 G01J1/42
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