发明名称 Vertical semiconductor component with source-down design and corresponding fabrication method
摘要 The present invention provides a semiconductor component having a substrate (10) of a first conduction type (n+); provided on the substrate (10), an optional first layer (20) of the second conduction type (p+) as body connection region; provided on the first layer (20) or the substrate (10), a second layer (30) of the second conduction type (p) as body region; provided on the second layer (30), a third layer (40) of the first conduction type (n) as drain region; a trench (140) reaching down to the substrate (10); a gate structure (90, 100) provided in the trench (140); and a source region (130) of the first conduction type (n+), said source region being provided in the second layer (30) in the periphery of the trench (140); the source region (130) being short-circuited with the first layer (20) and the substrate (10) by a conductive layer (120) provided in the lower region of the trench.
申请公布号 US6576953(B2) 申请公布日期 2003.06.10
申请号 US20010768015 申请日期 2001.01.23
申请人 INFINEON TECHNOLOGIES AG 发明人 HIRLER FRANZ
分类号 H01L21/336;H01L29/423;H01L29/78;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113 主分类号 H01L21/336
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