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发明名称
PLASMA PROCESSING SYSTEM
摘要
申请公布号
AU2002355030(A1)
申请公布日期
2003.06.10
申请号
AU20020355030
申请日期
2002.11.26
申请人
TOKYO ELECTRON LIMITED;KABUSHIKI KAISHA TOSHIBA
发明人
TOSHIHIRO HAYAMI;ETSUJI ITO;ITSUKO SAKAI
分类号
H01J37/32;(IPC1-7):H01L21/02;C23C16/50;C23C14/34;H01L21/205;H01L21/306
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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