| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a coating liquid for forming a low permittivity insulating film which can form the low permittivity insulating film capable of exhibiting stable electrical properties. <P>SOLUTION: The coating liquid for forming the low permittivity insulating film contains a curable resin having a carbon - carbon unsaturated group and an organic solvent, and has a water content of less than 2 molar equivalents based on the unsaturated group. The liquid contains a solvent containing at least one kind selected from a ketone solvent, an ester solvent, and ether solvent, and an aromatic hydrocarbon solvent as the organic solvent. <P>COPYRIGHT: (C)2003,JPO</p> |
