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发明名称
摘要
申请公布号
JP3415539(B2)
申请公布日期
2003.06.09
申请号
JP20000021199
申请日期
2000.01.31
申请人
发明人
分类号
H01L21/306;H01L21/304;(IPC1-7):H01L21/306
主分类号
H01L21/306
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