| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source which is capable of improving accelerating efficiency of ion beams by increasing evacuation efficiency between its electrodes. SOLUTION: In this ion source, an electrode 3 which is formed with a plural number of an ion extraction slit 3a being shaped in slit-like elongated, not formed with an ion extraction aperture 9a of a round shape, for instance circle, by arranging them in rows or columns equally spaced apart is mounted on an electrode-supporting flange 6 positioned at the final stage (located at a position farthest from a plasma source PS) among electrodes 7, 8, and 9 in an ion extraction portion. COPYRIGHT: (C)2003,JPO
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